Home » Vacuum Component » Process Gas Monitor (RGA) » High Pressure Process CGM2-Series
| Model | CGM2-051 | CGM2-052 |
| Mass filter type | Quadrupole | |
| Mass range | 1 to 50 amu | |
| Resolution | M/ΔM=1M (10% P.H.) | |
| Detector type | Faraday cup (FC) | EM Tube (SEM) / Faraday cup (FC) |
| Sensitivity | 10⁻⁷ A/Pa | SEM:10⁻⁴ A/Pa |
| 1.33×10⁻⁵ A/Torr | SEM:1.33×10⁻² A/Torr | |
| 10⁻⁵ A/mbar | SEM:10⁻² A/mbar | |
| Minimum detectable partial pressure | 1×10⁻⁷ Pa | SEM:1×10-10 Pa |
| 7.5×10-10 Torr | SEM:7.5×10-13 Torr | |
| 1×10⁻⁹ mbar | SEM:1×10-12 mbar | |
| Maximum operating pressure | FC:2 Pa | FC:2, SEM:1×10⁻² Pa |
| FC:1.5×10⁻² Torr | FC:1.5×10⁻² SEM:7.5×10⁻⁵ Torr | |
| FC:2×10⁻² mbar | FC:2×10⁻² SEM:1×10⁻⁴ mbar | |
| Linearity | 1Pa | |
| 7.5×10⁻³ Torr | ||
| 1×10⁻² mbar | ||
| Filament | lr/Y₂O₂ | |
| Ionzing voltage | 40eV | |
| Emission current | 0.1mA/0.4mA | |
| Degas | Electron bombard type 300V,5mA | |
| Total pressure function | Capable | |
| One Click function | Capable/He/H₂O/N₂/O₂/Any gas | |
| One Click leak test function | Capable | |
| Power input | DC24V ±10% 50W | |
| Weight(Sensor unit/sensor) | 2.1kg/0.44kg | 2.2kg/0.44kg |
| Maximum sensor operating temperature | 120℃(248℉) | |
Maximum bakeout temperature (electronics removed) | 250℃(482℉) | |
| Operating temperature range | 10 to 40℃ (50 to 104℉) | |
| Operating humidity range | 15 to 80% (not condensing) | |
| IP rating | IP30 (sensor unit) | |
| Power connector | MSTB2.5/3-STF-5.08 | |
| Communication interface | RS232C/RS485 (with option) | |
| External input/output connector | D-sub15-pin (M2.6 screw) | |
| Communication connector | RJ-45 | |
| External input/output signal | Analog input(0 to 10V)×2,External interlock input(pressure protection)×1,Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1 | |
| Software | Qulee QCS Ver. 4.0 later (Windows 8/10) | |
| Standard accessories | Power connector,Communication cable(3m long),Software(install CD),Instruction manual(clean paper) | |
Optional accessories (Cf. Qulee optional catalogue) | QIP(Auto-measuring package spec.),Communication cable(5m,10m,15m long),AC Power adapter,USB-LAN adapter,Swinting hub(8 ports or 16ports),Input / output connecter,Jacket heater,Carry case | |
| Applicable standard | CE | |
※When there is no RS232C port in PC,please purchase USB/RS232C micro converter of option.
※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.
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