By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.
Model | PRC-003A | PRC-006A | PRC-012A | PRC-018A | |||
| Maximum pumping speed | 50Hz | m3/h(L/min) | 280（4670） | 500（8330） | 1000（16700） | 1500（25000） | |
| 60Hz | 330（5500） | 600（10000） | 1200（20000） | 1800（30000） | |||
| Maximum suction pressure | 50Hz | Pa | 1.2 x 103 | 1.3 x 103 | 1.2 x 103 | ||
| 60Hz | 9.3 x 102 | 1.1 x 103 | 9.3 x 102 | ||||
| Maximum allowable differential pressure | 50Hz | Pa | 4.0 x 103 | 7.3 x 103 | 4.3 x 103 | ||
| 60Hz | 3.3 x 103 | 6.0 x 103 | 3.2 x 103 | ||||
| Ultimate pressure *1 | Pa | 4.0 x 10-1 | 6.7 x 10-1 | ||||
| Allowable drive pressure | Pa | ～1.0 x 105（atmospheric pressure start type） | |||||
| Motor *2 | kW | 0.75（2） | 2.2（2） | 3.7（2） | 5.5（2） | ||
| Oil *3 | ULVOIL R-4 | ||||||
| Oil quantity | L | 0.7 | 1.5 | 1.9 | |||
| Cooling method | Water cooling | ||||||
| Cooling water | Primary side pressure | MPa | 0.3 | ||||
| Inlet/outlet differential pressure Volume | MPa | 0.01< | |||||
| Inlet/outlet differential pressure Volume | L/min | 2 | 3 | ||||
| Temprature *4 | ℃ | 5 ～ 30 | |||||
| Inlet port JIS-B-2290 | VG80 / ISO80F(optional) | VG80(optional) | VG150(optional) | ||||
| Outlet port JIS-B-2290 | VF80(optional) | VF100(optional) | |||||
| Dimension（W×D×H） | mm | 296×575×260 | 356×619×320 | 406×759×340 | 406×989×340 | ||
| Weight total | kg | 51 | 86 | 118 | 150 | ||
| Standard roughing pump *5 | VD601 | VD901 | VS1501 | VS2401 | |||
| Optional | adapter flange, atmospheric pressure start type (Inverter), lubrication oil, lubrication chamber evacuation | ||||||
note)
*1 Measured by Pirani vacuum gauge. It will be about 4.0 x 10-2Pa when measured by MacLeod vacuum gauge.
*2 AC200V (50Hz/60Hz), AC220V (60Hz), 3Phase. Other voltage is available upon request.
*3 Synthetic (R-7000) or fluorine oil (J25F) is selectable as option
*4 Please use it in the environment of no be dewy when the temperature of cooling water is low.
*5 erformance of these pumps could change depending on roughing pump. Above data is based on standard roughing pump.