Vertical batch-type sputter systems. Series models include the SV-200 disk stamper model, and carousel types for large-volume substrate processing.
features
SV-4540, 6040 and 9045 are carousel types that can load a large volume of substrates. They are ideal for small- to medium-scale production, or for low-volume production of many different substrate types.
SV-200 is a system specialized for disk stamper Ni deposition. It features an ultra-compact design, fully-automatic operation and high throughput.
applications
Deposition of electrode films, insulating films or dielectric films on various substrates
